Dulmar Guud oo ku saabsan iska caabbinta sawirrada
Iska caabbinta sawir-qaadaha, oo sidoo kale loo yaqaan iska caabbinta sawir-qaadaha, waxaa loola jeedaa walax filim khafiif ah oo milmideedu isbeddesho marka la kulmo iftiinka UV, fallaadhaha elektarooniga ah, fallaadhaha ion-ka, raajooyinka X-ray, ama shucaac kale.
Waxay ka kooban tahay resin, photoinitiator, dareere, monomer, iyo waxyaabo kale oo lagu daro (fiiri Jadwalka 1). Resin photoresist iyo photoinitiator waa qaybaha ugu muhiimsan ee saameeya waxqabadka photoresist. Waxaa loo isticmaalaa dahaarka ka hortagga daxalka inta lagu jiro habka photolithography.
Marka la farsameynayo dusha sare ee semiconductor-ka, isticmaalka sawir-celiye si habboon loo xushay ayaa abuuri kara sawirka la rabo ee dusha sare.
Shaxda 1aad.
| Waxyaabaha ka hortagga sawir-qaadista | Bandhigga |
| Xaleef | Waxay ka dhigtaa photoresist dareere ah oo isbeddela, wax saameyn ahna kuma lahan sifooyinka kiimikada ee photoresist. |
| Sawir-qaadaha | Waxaa sidoo kale loo yaqaan sawir-qaadis ama wakiil sawir-qaadis ah, waa qaybta xasaasiga ah ee ku jirta walxaha sawir-qaadis ah. Waa nooc ka mid ah isku-dhafka oo u kala qaybsami kara xagjirro xor ah ama cations oo bilaabi kara falgallada isku-xidhka kiimikada ee monomers ka dib marka uu nuugo ultraviolet ama tamarta iftiinka ee la arki karo ee hirar gaar ah. |
| Resin | Waa polymers aan firfircoonayn, waxayna u dhaqantaa sidii xidhmooyin si ay isugu hayaan walxaha kala duwan ee ku jira photoresist-ka, taasoo siinaysa photoresist-ka sifooyinkiisa farsamo iyo kiimiko. |
| Monomer | Waxaa sidoo kale loo yaqaan walxaha firfircoon ee wax dila, waa molecules yaryar oo ka kooban kooxo shaqeynaya oo polymerizable ah waana iskudhisyo miisaan molecular hooseeya oo ka qayb qaadan kara falcelinta polymerization si loo sameeyo resins miisaan molecular sare leh. |
| Wax lagu daro | Waxaa loo isticmaalaa in lagu xakameeyo sifooyinka kiimikada gaarka ah ee sawir-qaadayaasha. |
Sawir-celiyeyaashu waxaa loo kala saaraa laba qaybood oo waaweyn iyadoo lagu saleynayo sawirka ay sameeyaan: togan iyo taban. Inta lagu jiro habka sawir-celiyeyaashu, ka dib soo-gaadhista iyo horumarinta, qaybaha la soo bandhigay ee dahaarka waa la milmaa, taasoo ka tagaysa qaybaha aan la soo bandhigin. Dahaarkan waxaa loo arkaa sawir-celiye togan. Haddii qaybaha la soo bandhigay ay sii jiraan inta qaybaha aan la soo bandhigin la milmayo, dahaarka waxaa loo arkaa sawir-celiye taban. Iyada oo ku xidhan isha iftiinka soo-gaadhista iyo isha shucaaca, sawir-celiyeyaashu waxaa loo sii kala saaraa UV (oo ay ku jiraan sawir-celiyeyaal UV togan iyo taban), sawir-celiyeyaal UV qoto dheer (DUV), sawir-celiyeyaal X-ray, sawir-celiyeyaal shucaac elektaroonig ah, iyo sawir-celiyeyaal shucaac ion ah.
Photoresist waxaa ugu horreyn loo isticmaalaa habaynta qaababka isku-dhafka ah ee looxyada bandhigga, wareegyada isku-dhafan, iyo aaladaha semiconductor-ka ee kala-go'an. Tiknoolajiyadda wax-soo-saarka ee ka dambeysa photoresist-ku waa mid adag, oo leh noocyo kala duwan oo alaab ah iyo qeexitaanno. Wax-soo-saarka wareegga isku-dhafan ee warshadaha elektaroonigga ah wuxuu ku soo rogaa shuruudo adag oo ku saabsan photoresist-ka la isticmaalo.
Ever Ray, oo ah soo saare 20 sano oo waayo-aragnimo ah oo ku takhasusay soo saarista iyo horumarinta resins-ka sawir-qaadista leh, ayaa leh awood wax-soo-saar sannadle ah oo dhan 20,000 oo tan, khad badeecadeed oo dhammaystiran, iyo awoodda lagu habeeyo alaabada. Qalabka sawir-qaadista, Ever Ray wuxuu leeyahay resin 17501 ah oo ah qaybta ugu weyn.
